Semiconductor Manufacturing and EMI

High precision, nearly-complete automation, premium value of manufactured products, and their long-term reliability expectations - all requires uninterrupted operation, minimum variations in process, reliable measurements, and near-100% yield. EMI interferes with these requirements in different but similar ways in each segment of semiconductor manufacturing.  SEMI E176 Standard provides specific recommendations to semiconductor manufacturers on acceptable levels of EMI and on EMI mitigation.  Read more about SEMI E176 in this and this articles in inCompliance Magazine (both are in our Library).  OnFILTER' products help semiconductor manufacturers to comply with SEMI E176 and reduce influence of EMI.  

Wafer Manufacturing: Front End

Main EMI Challenges

  • Uninterrupted operation

  • Accurate metrology

  • Error-free data communication

  • Consistent process and "recipes"

d

Device Manufacturing: Back End

Main EMI Challenges

  • Low EOS exposure to devices

  • Error-free device test

  • Uninterrupted operation

d

Common EMI Control Tools

MSN12 Power Line EM Adapter
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Measurements: "You cannot manage what you cannot measure" (attributed to Peter Drucker).  OnFILTER's unique power line EMI Adapters allow safe and accurate measurements of electrical noise on AC and DC power lines and ground with ordinary oscilloscope.  With EMI Adapters you can assess EMI levels at every step of your process and instantly verify any improvements that you have made.  

Servo and VFD Motors: These motors are the strongest EMI source inside equipment polluting the entire tool. Implementing servo motor / VFD filters not only reduces EMI throughout the tool but also improve reliability of motors' bearings.

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How OnFILTER Can Help

  • Measurements of conducted EMI on power lines and ground

  • Ground EMI filters that block propagation of EMI via facility ground

  • Ground EMI filters that block propagation of EMI inside tools

  • AC power line filters blocking EMI from facility power

  • DC filters cleaning up voltage from switched mode power supplies

  • Servo motor filters reducing EMI pollution from strongest EMI sources in equipment

How OnFILTER Can Help

  • Measurements of conducted EMI on power lines and ground

  • Ground EMI filters that block propagation of EMI via facility ground

  • Ground EMI filters that block propagation of EMI inside tools

  • AC power line filters blocking EMI from facility power

  • DC filters cleaning up voltage from switched mode power supplies

  • Servo motor filters reducing EMI pollution from strongest EMI sources in equipment

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