An article in inCompliance Magazine by Intel, Applied Materials and OnFILTER outlining basic steps for compliance with SEMI E176 Standard on reducing and managing electromagnetic interference in semiconductor manufacturing and handling. Full September 2019 issue of inCompliance magazine can be found here. An article on SEMI E176 itself can be found at this link.
Electromagnetic interference is a significant contributor to latent failure of devices in the field and yield, as well as process variations, equipment interruption and malfunction. Following SEMI E176 guidance on managing EMI and limiting EMI levels in process as recommended by SEMI E176 facilitates error-free operation, reduction of variables and higher reliability of devices.